 |
|
 |
 |
| |
|
| Accelerating voltage: |
5kV |
| |
|
|
Specimen:
|
|
| grids: |
3
mm TEM grids |
| specimen
exchange time: |
~
3 minutes |
| motorized
stage movement: |
3
mm |
| |
|
|
Electron
optics:
|
|
| condenser
lens |
permanent
magnets |
| focal
length |
4.3
mm |
| the
smallest illuminated area |
100
nm |
| condenser
apertures |
f
50, 30 µm |
| |
|
| objective
lens |
permanent magnets |
| focal
length |
1.26 mm
|
| CS |
0.64
mm |
| CC |
0.89
mm |
| δtheoretical |
1.1
nm |
| δtheoretical |
10-2
rad |
| Objective
(contrast) aperture |
f
50, 30 µm |
| |
|
| projection
lenses (TEM) |
electrostatic |
| mag.
on YAG screen |
36
– 360x |
| |
|
|
Electron
gun
(FEG):
|
|
|
Schottky
cathode W(100) - ZrO
|
|
| current
density |
0,5
mA sr-1 |
| lifetime
|
>
2,000 hours |
| |
|
|
Light
optics:
|
|
| objectives
Olympus M 4x |
NA
0.16 |
| objectives
Olympus M 40x |
NA
0.95 |
| binocular
M 10x |
|
|
dimension
of virtual image;
|
|
|
widefield
-
|
205
mm |
|
superwidefield
-
|
265
mm |
| |
|
|
Image
Capture:
|
|
| |
|
|
2K
Camera
|
|
| camera: |
Retiga
4000R CCD |
| |
2,048
x 2,048 pixels |
| Digitization |
12-bit |
| software |
QCapture
Pro |
| pixel
size |
7.4
x 7.4 µm |
| cooling |
optional
Peltier cooling available |
| |
|
| Imaging
modes: |
TEM,
ED, STEM, SEM |
|
TEM
|
|
| resolving
power |
2
nm |
|
magnification
|
|
|
with
light objective M4x |
1,500
- 19,500x |
|
with
light objective M40x |
15,000
- 195,000x |
| |
|
|
ED
(electron
diffraction)
|
|
| minimum
probe size |
100
nm |
| diffraction
lens |
magnification
3.5 |
| |
|
|
STEM
|
|
| resolving
power |
2
nm |
| min.
magnification (25 x 25 µm) |
6,000x |
| |
|
|
SEM
(BSE
detector)
|
|
| resolving
power |
3
nm |
| min.
magnification (200 x 200 µm) |
800x |
| |
|
|
Vacuum:
|
|
|
airlock
system
(for sample exchange)
|
|
|
diaphragm
and
|
|
| turbomolecular
pump |
10-5
mbar |
| |
|
|
object
space
|
|
| ion
getter pump (10 lsec-1) |
10-8
mbar |
| |
|
|
electron
gun
|
|
| ion
getter pump (3 lsec-1) |
10-9
mbar |
| |
|
|
Electrical
requirements
(Consumption):
|
|
| Standby
(ion getter pumps only) |
11
W |
| |
|
| Power
Supply |
120
W |
| |
|
| Airlock
vacuum pumping system |
250
W |
| |
|
|
Click here for
statement of electrical conformity
|
PDF
HTML (in new window) |
|
Dimensions:
|
|
|
| |
weight |
size
(l x w x h) |
| Electron
and Light optics system |
25
kg |
300
x 210 x 300 mm |
| (Microscope
proper and housing) |
55
lbs |
12
x 8 x 12 inches |
| |
|
|
| Airlock
pumping system |
20 kg |
420 x 220
x 290 mm |
| (Floor-based
turbo-molecular pump) |
44 lbs |
16 x 9 x
11 inches |
| |
|
|
| Power
Supply |
25 kg |
420 x 220
x 290 mm |
| (Electronics
unit) |
55 lbs |
16 x 9 x
11 inches |
| |
|
|
|
No
cooling water is required
|
|
|
|
|
|
 |
|
|
|
 |