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Accelerating voltage: |
5kV |
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Specimen:
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|
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grids: |
3 mm TEM grids |
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specimen exchange time:
|
~ 3 minutes |
|
motorized stage movement: |
3 mm |
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Electron optics:
|
|
|
condenser lens |
permanent magnets |
|
focal length |
4.3 mm |
|
the smallest illuminated
area |
100 nm |
|
condenser apertures |
f
50, 30 µm |
| |
|
|
objective lens |
permanent magnets |
|
focal length |
1.26 mm |
|
CS |
0.64 mm |
|
CC |
0.89 mm |
|
δtheoretical |
1.1 nm |
|
δtheoretical |
10-2 rad |
|
Objective (contrast)
aperture |
f
50, 30 µm |
| |
|
|
projection lenses (TEM) |
electrostatic |
|
mag. on YAG screen |
36 – 360x |
| |
|
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Electron gun (FEG):
|
|
|
Schottky cathode W(100) -
ZrO
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|
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current density |
0,5 mA sr-1 |
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lifetime |
> 2,000 hours |
| |
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Light optics:
|
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objectives Olympus M 4x |
NA 0.16 |
|
objectives Olympus M 40x |
NA 0.95 |
|
binocular M 10x |
|
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dimension of virtual image;
|
|
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widefield -
|
205 mm |
|
superwidefield -
|
265
mm |
| |
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Image Capture:
|
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| |
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1K Camera
|
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camera: |
Retiga 2000R CCD |
| |
1,600 x 1,200 pixels |
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Digitization |
12-bit |
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software |
QCapture Pro |
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pixel size |
7.4 x 7.4 µm |
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cooling |
optional Peltier cooling
available |
| |
|
|
2K Camera
|
|
|
camera: |
Retiga 4000R CCD |
| |
2,048 x 2,048 pixels |
|
Digitization |
12-bit |
|
software |
QCapture Pro |
|
pixel size |
7.4 x 7.4 µm |
|
cooling |
optional Peltier cooling
available |
| |
|
|
Imaging modes: |
TEM, ED, STEM, SEM |
|
TEM
|
|
|
resolving power |
2.5 nm |
|
magnification
|
|
|
with light
objective M4x |
1,500 - 19,500x |
|
with light
objective M40x |
15,000 - 195,000x |
| |
|
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ED (electron diffraction)
|
|
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minimum probe size |
100 nm |
|
diffraction lens
|
magnification 3.5 |
| |
|
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STEM
|
|
|
resolving power |
2 nm |
|
min. magnification (25 x 25
µm) |
6,000x |
| |
|
|
SEM (BSE detector)
|
|
|
resolving power |
2 nm |
|
min. magnification (200 x
200 µm) |
800x |
| |
|
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Vacuum:
|
|
|
airlock system (for sample
exchange)
|
|
|
diaphragm and
|
|
|
turbomolecular pump |
10-5 mbar |
| |
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object space
|
|
|
ion getter pump (10 lsec-1)
|
10-8 mbar |
| |
|
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electron gun
|
|
|
ion getter pump (3 lsec-1) |
10-9 mbar |
| |
|
|
Electrical requirements
(Consumption):
|
|
|
Standby (ion getter pumps
only) |
11 W |
| |
|
|
Power Supply |
120 W |
| |
|
|
Airlock vacuum pumping
system |
250 W |
| |
|
|
Click here for statement of
electrical conformity
|
PDF
HTML
(in new window) |
|
Dimensions:
|
|
|
| |
weight |
size (l x w x
h) |
|
Electron and Light optics
system |
25 kg |
300 x 210 x 300 mm |
|
(Microscope proper and
housing) |
55 lbs |
12 x 8 x 12 inches |
| |
|
|
|
Airlock pumping system |
20 kg |
420 x 220 x 290 mm |
|
(Floor-based turbo-molecular
pump) |
44 lbs |
16 x 9 x 11 inches |
| |
|
|
|
Power Supply |
25 kg |
420 x 220 x 290 mm |
|
(Electronics unit) |
55 lbs |
16 x 9 x 11 inches |
| |
|
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No cooling water is required
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